双极型晶体管的反向击穿tcad_双极型晶体管有哪些

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go athena #TITLE:Polysilicon Emitter Bipolar Example-Ssuprem4->Devedit->Spisces2 #

line x loc=0.00 spac=0.03 line x loc=0.2 spac=0.02 line x loc=0.24 spac=0.015 line x loc=0.3 spac=0.015 line x loc=0.8 spac=0.15 # line y loc=0.00 spac=0.01 line y loc=0.07 spac=0.01 line y loc=0.1 spac=0.01 line y loc=0.12 spac=0.01 line y loc=0.3 spac=0.02 line y loc=0.5 spac=0.06 line y loc=1.0 spac=0.35 # 衬底定义

init silicon c.arsenic=2e16 orientation=100 # 离子注入与退火

implant boron dose=2.5e13 energy=18 tilt=0 rotation=0 crystal #

diffus time=60 temp=920 nitro #

deposit polysilicon thick=0.3 divisions=6 #

implant arsenic dose=7.5e15 energy=50 tilt=0 rotation=0 crystal #

etch polysilicon right p1.x=0.2 # relax y.min=0.2 x.min=0.2 relax y.min=0.2 x.min=0.2 #

method compre fermi diffus time=25 temp=920 dryo2 pre=1.00 #

diffus time=50 temp=900 nitro pre=1.00 #

implant boron dose=2.5e13 energy=18 tilt=0 rotation=0 crystal #

deposit oxide thick=0.4 divisions=10 min.space=0.1 #

etch oxide dry thick=0.5 #

implant boron dose=1e15 energy=30 tilt=0 rotation=0 crystal

#

diffus time=60 temp=900 nitro pre=1.00 # struct mirror left #

deposit aluminum thick=0.05 divisions=2 #

etch aluminum start x=-0.16 y=-4 etch cont x=-0.16 y=0.2 etch cont x=-0.6 y=0.2 etch done x=-0.6 y=-4

etch aluminum right p1.x=0.15 # electrode name=emitter x=0.00 # electrode name=base x=-0.65 # electrode name=collector backside # struct outfile=bjtex01_0.str go devedit # init infile=bjtex01_0.str base.mesh height=0.25 width=0.25 bound.cond apply=false max.ratio=300 constr.mesh max.angle=90 max.ratio=300 max.height=1 max.width=1

min.height=0.0001 min.width=0.0001 constr.mesh type=Semiconductor default constr.mesh type=Insulator max.angle=90 default constr.mesh type=Metal max.angle=90 default imp.refine min.spacing=0.025 imp.refine imp=“Arsenic” sensitivity=0.5 imp.refine imp=“Boron” sensitivity=0.5 mesh struct outfile=bjtex01_0.str go atlas # mesh infile=bjtex01_0.str # material number=2 taun0=5e-6 taup0=5e-6 # contact name=emitter n.poly surf.rec # models bipolar print

# impact selb # solve init method newton trap solve vbase=0.05 solve vbase=0.1 solve vbase=0.3 solve vbase=0.5 solve vbase=1.0 contact name=base current method newton trap ir.tol=1.e-20 ix.tol=1.e-20 solve ibase=3.e-18 log outf=bjtex01_1.log master # solve vcollector=0.5 solve vcollector=2 solve vcollector=3 solve vcollector=4 solve vcollector=5 solve vstep=0.5 vfinal=5 name=collector compl=5.e-11 e.comp=3 save outf=bjtex01_3.str tonyplot bjtex01_3.str tonyplot bjtex01_1.log # quit